| Bill Of Materials | Qty | Unit | Total | Notes |
| Edwards AIM-X x 1/2 | 1 | ea | 990.36 | |
| elbow SS 1/2 | 4 | ea | 233.80 | |
| fitting hanger 1/2 | 4 | ea | 292.48 | |
| labor assembly/fabrication (min) | 60 | min | 55.20 | |
| low flow valve 1/4 + actuator | 3 | ea | 1,276.86 | |
| MKS 901P x 1/2 | 1 | ea | 1,187.44 | |
| plug valve 1/2 + actuator | 1 | ea | 377.51 | |
| plug valve 1/2 + actuator ORS out | 1 | ea | 382.04 | |
| plug valve 1/4 + actuator | 4 | ea | 1,023.04 | |
| port connector 1/2 x 1/4 | 7 | ea | 193.69 | |
| port filter 1/2 SS 10 um | 2 | ea | 7.42 | |
| port pressure sensor 30 psi no spacer | 2 | ea | 159.82 | |
| QF16-1/2 | 1 | ea | 39.94 | |
| SS tubing cut and finished | 6 | ea | 96.30 | |
| SS316 EP tubing 1/2 x 035 | 20 | in | 24.60 | |
| SS316 EP tubing 1/2 x 035 x 1.799 | 9 | ea | 78.66 | |
| SS316 EP tubing 1/4 x 035 x 1.500 | 3 | ea | 12.30 | |
| tee SS 1/2 | 7 | ea | 557.20 | |
| tee SS 1/2 2 ORS 90 | 1 | ea | 93.76 | |
| tee SS 1/2 ported | 1 | ea | 142.66 | |
| union SS 1/2 ported ORS | 1 | ea | 100.58 | |
| Vacuum Pump Station T-85 KF16 | 1 | ea | 13,477.97 | |
| Vacuum Section LR | 1 | ea | 20,803.63 |
| Used on | Qty |
| CEGS LL6X1 | 1 |
| CEGS 6X1 | 1 |
| CEGS LL6x1+1i+VP | 1 |
| CEGS 6X | 1 |
| CEGS LL6 | 1 |
| CEGS 6X CR | 1 |
| CEGS 6X1 CR | 1 |
| CEGS LL6 CR | 1 |
| CEGS LL6X1 CR | 1 |
| CEGS LL6x1+2ISEL+VP | 1 |