| Bill Of Materials | Qty | Unit | Total | Notes |
| LDPE tubing 1/2 x 3/8 | 4 | ft | 2.40 | |
| O-ring 210 V75A | 2 | ea | 0.68 | |
| O-ring 320 V75A | 1 | ea | 1.30 | |
| oil mist filter | 1 | ea | 148.42 | |
| ORS seat 1/2 x 0.224 | 2 | ea | 8.60 | |
| QF25 0.5 x 1.375 | 1 | ea | 21.44 | |
| QF25 clamp Al | 1 | ea | 15.24 | |
| roughing pump vibration isolator | 1 | ea | 67.06 | |
| roughing pump, Edwards E2M8 | 1 | ea | 1,904.50 | |
| union SS 1/2 | 1 | ea | 42.72 | |
| vacuum system, rotary vane | 1 | ea | 2,212.36 |
| Used on | Qty |
| vacuum system for SPS | 1 |
| CEGS Vacuum System v7 | 1 |
| Purdue - Add two pumped furnaces | 2 |
| CEGS Vacuum System v8 | 1 |