| Bill Of Materials | Qty | Unit | Notes |
| LDPE tubing 500 x 375 | 4 | ft | |
| O-ring 210 V75A | 2 | ea | |
| O-ring 320 V75A | 1 | ea | |
| oil mist filter | 1 | ea | |
| ORS seat 1/2 x 0.224 | 2 | ea | |
| QF25 0.5 x 1.375 | 1 | ea | |
| QF25 clamp Al | 1 | ea | |
| roughing pump vibration isolator | 1 | ea | |
| roughing pump, Edwards E2M8 | 1 | ea | |
| union SS 1/2 | 1 | ea | |
| vacuum system, rotary vane | 1 | ea |
| Used on | Qty |
| vacuum system for SPS | 1 |
| Purdue - Add two pumped furnaces | 2 |